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Experimental results on the atmospheric hollow cathode plasma generation and performance, using a special configuration with tunable wall separations, are presented. The influence of the gas and type of the power used for generation on the optimum size of the cathode slit is investigated. The experimental results are in agreement with the hollow cathode model. The plasma source/plasma reactor design...
The present study investigates the antibacterial properties of CuCrO 2 thin film surfaces against Escherichia coli (E. coli) bacteria. Single-phase delafossite type copper-chromium oxide (CuCrO 2 ) thin films were prepared on glass substrate by radio-frequency (RF) magnetron sputtering, followed by two-step post-deposition annealing at 400 °C with 5% forming gas and at 600 °C in a...
Electrochromic switchable mirrors can be reversibly changed between a reflective state and a transparent state by applying a voltage. In our previous work, the properties of the device were significantly affected by environmental factors such as temperature and relative humidity. In that work, the effects on the device properties were investigated through an accelerated degradation test in a thermostat/humidistat...
Nickel oxide (NiO) nano-structures were synthesized on random carbon nanotubes (CNTs) growing on a carbon cloth substrate processed using vacuum annealing and oxygen plasma treatment for the electric double layer capacitor electrode application (EDLC). From the electrochemical measurement analytical results the NiO nano-structure/CNT composite electrode with carbon cloth substrate exhibits low internal...
Fe 100-x Pt x films with Pt contents (x) = 29–65 at.% were deposited directly onto thermally oxidized Si(100) substrate by dc magnetron sputtering. The films were then post-annealed at 700 °C for 3 min by rapid thermal annealing (RTA) at a high heating ramp rate of 100 °C/s. Experimental results show that Fe 3 Pt film displayed (111) preferred orientation and tended towards...
Seven Cr–B–N films with various boron contents ranging from 3.7 to 20.6 at.% were deposited by a bipolar asymmetric pulsed DC reactive magnetron sputtering system. The structures of thin films were characterized by X-ray diffraction (XRD). The surface and cross-sectional morphologies of thin films were examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The surface...
We produced a 915 MHz ECR plasma with TM 01 microwaves for different magnetic flux density distributions and examined the radial profiles of the ion saturation current as a function of pressure and power. It was found that the 915 MHz ECR plasma is uniform over 200 mm in diameter around the L-cutoff density and when a diverging magnetic field is used, a low electron temperature plasma is realized.
Depositing microcrystalline intrinsic silicon films is an important step for the production of thin silicon tandem junction solar cells. Due to the high cost of capital equipment, it is becoming increasingly important to improve the processing speed of thin silicon films for continued commercial viability. In this work, a combination of the excitation frequencies 13.56MHz + 27.12 MHz was used for...
The aim of this study was to determine the sliding wear resistance of D6ac (tempered at room temperature, 450, or 550°C) and to perform tribological responds. The obtained microstructures exhibited a heavy number of misfit dislocations from work hardening of the parent material, with the degree of disorder dislocation decreasing gradually upon increasing the temperature from 450 to 550°C. XRD spectra...
TiAlN/SiN x multilayers were fabricated by a reactive magnetron sputtering system combining r.f. and d.c. power sources. The SiN x layer thickness (l SiNx ) was 0.4 and 1 nm, while the layer thickness ratios (l TiAlN /l SiNx ) of TiAlN to SiN x were adjusted to be 4/0.4 and 4/1, respectively. Characterizations by XRD, TEM, SEM and nano-indentation revealed...
The development of the interdiffusion processes and the surface morphology changes in thin films of Au(120 nm)/Ni(70 nm) during annealing at 200 °C for 20 min in vacuum with different residual atmosphere pressures of 10 −3 and 10 −6 Pa and in an environment of hydrogen at a pressure of 5 × 10 2 Pa have been studied. Secondary ion mass spectrometry, Auger electron spectroscopy,...
In this experimental work, ZnO-polyaniline composite thin films, to which we added some polyvinyl alcohol, have been prepared using solution-casting technique. Then their current–voltage characteristics were studied. The results show that the films have varistor behavior and can be used to protect circuits from 100 V up to 350 V over voltages. In addition, it is found that the higher the amount of...
Examples of simulations of all relevant sputtering processes are described in this paper. Processes include plasma formation, target erosion, emission of sputtered atoms, and deposition of sputtered atoms for two types of magnetron sputtering apparatuses. One is axisymmetric and the other is three-dimensional.
We studied the effects of surface oxidation on the kinetics of deuterium (D 2 ) absorption by Sc. A Sieverts apparatus was used to measure the D 2 absorption kinetics and X-ray photoelectron spectroscopy (XPS) was used to determine the surface oxidation state during heat treatments in ultra-high vacuum. In the as-received condition, the bulk Sc sample was covered by an Sc 2 ...
Fe–Cu co-doped ZnO thin films deposited on silicon substrates were prepared by R.F. magnetron sputtering. The effects of various amounts of copper on the microstructure, surface morphology, composition, and magnetic properties of ZnO thin films were examined. The results of the experiments show that the structures of the ZnO thin films grown on the silicon substrate have a preferred orientation of...
Ag–Ti (100 nm) alloy film, and Ti/Ag (100 nm) double-layer and Ti/Ag (100 nm)/Ti triple-layer films were prepared by rf sputtering to investigate the effect of Ti on suppression of agglomeration of the Ag thin film caused by thermal treatment. Scanning electron microscopy revealed that the Ag–Ti and Ti/Ag/Ti films had high thermal stability. X-ray photoelectron spectroscopy analysis showed that the...
Ag thin films were deposited by magnetron sputtering in a mixture of argon and nitrogen. The salt-water durability and reflectance of Ag thin films were investigated as a function of nitrogen gas flow ratio during sputter deposition. The reflectance of as-deposited Ag thin films decreased with increasing nitrogen gas flow ratio; however, the difference in visible-light reflectance between the Ag thin...
The quantitative evolution of the residual stress states in the surface layers of an AISI D2 steel after Low Energy High Current Pulsed Electron Beam (LEHCPEB) treatment has been investigated by using X-ray diffraction technique. The initial material contained mainly ferrite plus carbides and the ferrite had a compressive stress of about 560 MPa. After the LEHCPEB treatment, the residual stress of...
The effect of Sn and Fe nanoparticles as additives of multialkylated cyclopentanes (MACs) was investigated in vacuum (∼10 −4 Pa) by a vacuum four-ball tribometer. Results showed that the steel balls exhibited the transient seizure-like high friction when lubricated with MACs base oil in vacuum, while introducing Sn and Fe nanoparticles could effectively eliminate it. Moreover, Sn nanoparticles...
A local high pressure micro plasma jet was proposed for micro scale local sputter etching in a vacuum system. A small orifice gas nozzle as an anode was placed in a Scanning Electron Microscope (SEM) chamber to produce the local high gas pressure and supply Argon gas for DC plasma generation at a short gap distance. The characteristics of local sputter etching by the micro plasma jet were studied...
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